Block manifold (MN3Q)
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Cylinder bore size: φ4 to φ16]
[Cylinder bore size: φ4 to φ16]
Industry:
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products