Ejector unit (10.3 mm width) (VSN/VSNM)
Compact ejector unit that achieves high speed and stable response.
Compact and lightweight, with height dimension especially compact.
[Nozzle diameter] 0.4, 0.5, 0.6 (mm)
[Intake flow rate] 2 to 9.5 (L/min (ANR))
Industry:
- Semiconductor manufacturing process (post-process)