Air operated valve / Drip prevention valve integrated (AMDS)
It has a compact structure that ensures draining and controls the drip prevention with high precision. It can be used to prevent problems such as poor chemical liquid discharge to wafers.
It supports optimized custom design according to the fluid viscosity.
An air operated valve integrated type that has been downsized and reduces steps in piping.
Industry:
- Semiconductor manufacturing process (pre-process)
